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Transformation of Enhanced Glow Discharge Dynamics in Nitrogen Plasma Immersion Ion Implantation

✍ Scribed by Lu, Qiuyuan; Li, Liuhe; Li, Penghui; Xu, Ruizhen; Fu, Ricky King-Yu; Chu, Paul K.

Book ID
121755179
Publisher
IEEE
Year
2013
Tongue
English
Weight
425 KB
Volume
41
Category
Article
ISSN
0093-3813

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✍ C.Z. Gong; Z.T. Zhu; J.W. Shi; S.Q. Yang; X.B. Tian; P.K. Chu πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 532 KB

Plasma immersion ion implantation (PIII) is an effective surface processing technique. However, it is still difficult to implant the inner wall of a cylindrical bore using this technique due to the internal small-volume effect. This paper presents a new approach based on self-excited radio-frequency