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Investigation of plasma potential and pulsed discharge characteristics in enhanced glow discharge plasma immersion ion implantation and deposition

✍ Scribed by Liuhe Li; Qiuyuan Lu; Ricky K.Y. Fu; Paul K. Chu

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
552 KB
Volume
267
Category
Article
ISSN
0168-583X

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