Electrical characteristics and growth kinetics in discharges used for plasma deposition of amorphous carbon

✍ Scribed by Y. Catherine; P. Couderc

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 641 KB
• Volume: 144
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(86)90419-0