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Plasma immersion ion implantation based on glow discharge with electrostatic confinement of electrons

✍ Scribed by Alexander Metel

Book ID: 108423051
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 169 KB
Volume: 156
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(02)00070-1

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