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Plasma immersion ion implantation using a glow discharge source with controlled plasma potential

โœ Scribed by M. Ueda; G.F. Gomes; L.A. Berni; J.O. Rossi; J.J. Barroso; A.F. Beloto; E. Abramof; H. Reuther

Book ID
114171946
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
200 KB
Volume
161-163
Category
Article
ISSN
0168-583X

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