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Experimental investigation of hybrid-evaporation-glow discharge plasma immersion ion implantation

โœ Scribed by Li, L. H.; Wu, Y. Q.; Zhang, Y. H.; Fu, Ricky K. Y.; Chu, Paul K.

Book ID
111973945
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
406 KB
Volume
97
Category
Article
ISSN
0021-8979

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