✦ LIBER ✦

Sheath dynamics in plasma immersion ion implantation

✍ Scribed by Brutscher, Jörg; Günzel, Reinhard; Möller, Wolfhard

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Sheath dynamics in plasma immersion ion

✍ R. Günzel; J. Brutscher 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 694 KB

Plasma-sheath expansion around trenches

✍ B. Rauschenbach; S. Mändl 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 255 KB

Influence of plasma density and plasma s

✍ H. Bender; J. Brutscher; W. Ensinger; R. Günzel; J. Halder; H. Klein; B. Rausche 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 378 KB

Plasma-immersion ion implantation

✍ Rainer W Thomae 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 138 KB

Simulation methods of ion sheath dynamic

✍ Jiuli Wang; Guling Zhang; Younian Wang; Yuanfu Liu; Chizi Liu; Size Yang 📂 Article 📅 2004 🏛 Springer 🌐 English ⚖ 502 KB

Two-dimensional modeling and simulation

✍ Shu Qin; Yuanzhong Xhou; Chung Chan 📂 Article 📅 1999 🏛 IEEE 🌐 English ⚖ 288 KB