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Plasma-immersion ion implantation

✍ Scribed by Rainer W Thomae

Book ID: 114169869
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 138 KB
Volume: 139
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(97)00952-x

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