✦ LIBER ✦

Processing considerations with plasma immersion ion implantation

✍ Scribed by Nathan W Cheung

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Design considerations for plasma immersi

✍ S. Mändl; J. Brutscher; R. Günzel; W. Möller 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 319 KB

Plasma-immersion ion implantation

✍ Rainer W Thomae 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 138 KB

Plasma immersion ion implantation reacto

✍ W. En; B.P. Under; N.W. Cheung 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 536 KB

Plasma immersion ion implantation with d

✍ Linder, B.P.; Cheung, N.W. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 774 KB

A comparison of plasma immersion ion imp

✍ M.J. Kenny; L.S. Wielunski; J. Tendys; G.A. Collins 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 311 KB

Conformal implantation for trench doping

✍ X.Y. Qian; N.W. Cheung; M.A. Lieberman; R. Brennan; M.I. Current; N. Jha 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 459 KB