✦ LIBER ✦

Conformal implantation for trench doping with plasma immersion ion implantation

✍ Scribed by X.Y. Qian; N.W. Cheung; M.A. Lieberman; R. Brennan; M.I. Current; N. Jha

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Trench homogeneity in plasma immersion i

✍ P Huber; G Keller; J.W Gerlach; S Mändl; W Assmann; B Rauschenbach 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 144 KB

Plasma-sheath expansion around trenches

✍ B. Rauschenbach; S. Mändl 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 255 KB

A comparison of plasma immersion ion imp

✍ M.J. Kenny; L.S. Wielunski; J. Tendys; G.A. Collins 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 311 KB

Plasma immersion ion implantation doping

✍ Qin, S.; McGruer, N.E.; Chan, C.; Warner, K. 📂 Article 📅 1992 🏛 IEEE 🌐 English ⚖ 514 KB

Processing considerations with plasma im

✍ Nathan W Cheung 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 788 KB

Plasma immersion ion implantation with d

✍ Linder, B.P.; Cheung, N.W. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 774 KB