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Plasma immersion ion implantation doping using a microwave multipolar bucket plasma

โœ Scribed by Qin, S.; McGruer, N.E.; Chan, C.; Warner, K.

Book ID
114534837
Publisher
IEEE
Year
1992
Tongue
English
Weight
514 KB
Volume
39
Category
Article
ISSN
0018-9383

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Plasma immersion ion implantation of Peb
Plasma immersion ion implantation of Pebax polymer
โœ A. Kondyurin; P. Volodin; J. Weber ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 465 KB

Nitrogen plasma immersion ion implantation (PIII) was applied to Pebax thin films and plates using doses ranging from 5 โ€ข 10 14 to 10 17 ions/cm 2 at applied voltages of 5, 10, 20 and 30 kV. The analysis of the Pebax structure after implantation was performed using FTIR ATR, Raman, UV-vis transmissi