✦ LIBER ✦

A comparison of plasma immersion ion implantation with conventional ion implantation

✍ Scribed by M.J. Kenny; L.S. Wielunski; J. Tendys; G.A. Collins

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma-immersion ion implantation

✍ Rainer W Thomae 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 138 KB

Plasma immersion ion implantation of UHM

✍ H. Dong; T. Bell; C. Blawert; B. L. Mordike 📂 Article 📅 2000 🏛 Springer 🌐 English ⚖ 51 KB

Plasma immersion ion implantation of ste

✍ G.A. Collins; R. Hutchings; J. Tendys 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 632 KB

Processing considerations with plasma im

✍ Nathan W Cheung 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 788 KB

Plasma immersion ion implantation with d

✍ Linder, B.P.; Cheung, N.W. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 774 KB

Conformal implantation for trench doping

✍ X.Y. Qian; N.W. Cheung; M.A. Lieberman; R. Brennan; M.I. Current; N. Jha 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 459 KB