✦ LIBER ✦

Plasma immersion ion implantation reactor design considerations for oxide charging

✍ Scribed by W. En; B.P. Under; N.W. Cheung

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Design considerations for plasma immersi

✍ S. Mändl; J. Brutscher; R. Günzel; W. Möller 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 319 KB

A plasma immersion ion implantation reac

✍ X.Y. Qian; D. Carl; J. Benasso; N.W. Cheung; M.A. Lieberman; I.G. Brown; J.E. Ga 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 386 KB

Modeling and experiments of waveform eff

✍ En, W.G.; Cheung, N.W. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 336 KB

A Specially Designed PLC-Based High-Volt

✍ Zhu, Zongtao; Gong, Chunzhi; Wang, Zhijian; Tian, Xiubo; Li, Yi; Yang, Shiqin; F 📂 Article 📅 2010 🏛 IEEE 🌐 English ⚖ 693 KB

Instrumental and process considerations

✍ Chu, P.K.; Shu Qin; Chung Chan; Cheung, N.W.; Ko, P.K. 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 160 KB

Palladium seeding on the tantalum-insula

✍ J.H Lin; Y.Y Tsai; S.Y Chiu; T.L Lee; C.M Tsai; P.H Chen; C.C Lin; M.S Feng; C.S 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 404 KB