✦ LIBER ✦

A plasma immersion ion implantation reactor for ULSI fabrication

✍ Scribed by X.Y. Qian; D. Carl; J. Benasso; N.W. Cheung; M.A. Lieberman; I.G. Brown; J.E. Galvin; R.A. MacGill; M.I. Current

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma immersion ion implantation reacto

✍ W. En; B.P. Under; N.W. Cheung 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 536 KB

PMOS integrated circuit fabrication usin

✍ Carey A. Pico; Michael A. Lieberman; Nathan W. Cheung 📂 Article 📅 1992 🏛 Springer US 🌐 English ⚖ 471 KB

A comparison of plasma immersion ion imp

✍ M.J. Kenny; L.S. Wielunski; J. Tendys; G.A. Collins 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 311 KB

Ion beam analysis of plasma immersion im

✍ N.Q. Khánh; I. Pintér; Cs. Dücső; M. Ádám; E. Szilágyi; I. Bársony; M.A. El-Sher 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 395 KB

Conformal implantation for trench doping

✍ X.Y. Qian; N.W. Cheung; M.A. Lieberman; R. Brennan; M.I. Current; N. Jha 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 459 KB

Design considerations for plasma immersi

✍ S. Mändl; J. Brutscher; R. Günzel; W. Möller 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 319 KB