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PMOS integrated circuit fabrication using BF3plasma immersion ion implantation

✍ Scribed by Carey A. Pico; Michael A. Lieberman; Nathan W. Cheung

Book ID: 112822239
Publisher: Springer US
Year: 1992
Tongue: English
Weight: 471 KB
Volume: 21
Category: Article
ISSN: 0361-5235
DOI: 10.1007/bf02670923

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