Optical and mechanical properties of alumina films fabricated on Kapton polymer by plasma immersion ion implantation and deposition using different biases

✍ Scribed by Yongxian Huang; Xiubo Tian; Shiqin Yang; Ricky K.Y. Fu; Paul K. Chu

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 956 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.06.011