A Specially Designed PLC-Based High-Voltage Pulse Modulator for Plasma Immersion Ion Implantation

✍ Scribed by Zhu, Zongtao; Gong, Chunzhi; Wang, Zhijian; Tian, Xiubo; Li, Yi; Yang, Shiqin; Fu, Ricky K. Y.; Chu, Paul K.

• Book ID: 118063441
• Publisher: IEEE
• Year: 2010
• Tongue: English
• Weight: 693 KB
• Volume: 38
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/tps.2010.2051166