Plasma-immersion ion implantation of the interior surface of a small cylindrical bore using an auxiliary electrode for finite rise-time voltage pulses

✍ Scribed by Xuchu Zeng; Tat-Kun Kwok; Aiguo Liu; Chu, P.K.; Baoyin Tang; Sheridan, T.E.

• Book ID: 114558474
• Publisher: IEEE
• Year: 1998
• Tongue: English
• Weight: 194 KB
• Volume: 26
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.669623