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A two-switch mode pulse modulator for plasma-based ion implantation and deposition

✍ Scribed by Ken Yukimura; Tomoyuki Muraho

Book ID: 114167181
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 148 KB
Volume: 206
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)00850-4

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