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Computer simulation of plasma for plasma immersed ion implantation and deposition with bipolar pulses

โœ Scribed by Y. Miyagawa; M. Ikeyama; S. Miyagawa; H. Nakadate


Book ID
114167176
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
219 KB
Volume
206
Category
Article
ISSN
0168-583X

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