✦ LIBER ✦

Numerical Simulation of Plasma Immersion Ion Implantation and Diffusion

✍ Scribed by Tat-Kun Kwok, D.

Book ID: 114667100
Publisher: IEEE
Year: 2007
Tongue: English
Weight: 196 KB
Volume: 35
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2007.896979

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