๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Ion current on the inner surface of a pipe by plasma-based ion implantation and deposition

โœ Scribed by X.X. Ma; K. Yukimura; T. Ikehata; Y. Miyagawa


Book ID
114167186
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
221 KB
Volume
206
Category
Article
ISSN
0168-583X

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Comparison of ZrN and TiN formed by plas
โœ S. Heinrich; S. Schirmer; D. Hirsch; J.W. Gerlach; D. Manova; W. Assmann; S. Mรคn ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 989 KB

ZrN and TiN films have been deposited on Si substrates without additional heating using plasma based ion implantation & deposition (PBII&D) with pulse voltage from 0 to 5 kV. High quality columnar films have been obtained in both systems with a slight nitrogen deficiency. For ZrN, a marked reduction