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Effect of ion beam implantation on density of DLC prepared by plasma-based ion implantation and deposition

โœ Scribed by Y. Oka; M. Kirinuki; T. Suzuki; M. Yatsuzuka; K. Yatsui

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
90 KB
Volume
242
Category
Article
ISSN
0168-583X

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