✦ LIBER ✦
Ion sheath evolution and plasma replenishment inside an 80-mm-diameter pipe for plasma-based ion implantation and deposition
✍ Scribed by X.X. Ma; K. Yukimura; T. Muraho
- Book ID
- 114167180
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 204 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0168-583X
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