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Tracing the Ti-silicide formation by in situ ellipsometric measurements

✍ Scribed by T. Stark; F. Hergert; L. Ley

Book ID: 104420693
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 394 KB
Volume: 6
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(03)00074-x

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