Formation of titanium silicides on a silicon surface by transfer of titanium iodides through a gas phase in the Ti-Si-I system

✍ Scribed by V. T. Vesna; Yu. A. Lapidus; V. P. Maslov; A. G. Filippovich

• Book ID: 104944409
• Publisher: Springer
• Year: 1992
• Tongue: English
• Weight: 383 KB
• Volume: 31
• Category: Article
• ISSN: 1573-9066
• DOI: 10.1007/bf00797630