✦ LIBER ✦
Simultaneous formation of titanium nitride and titanium silicide in a one-step process in heterogeneous phase during multipulse laser treatment of a Si wafer with a thin Ti coating in superatmospheric N2
✍ Scribed by I.N. Mihailescu; N. Chitica; Adriana Lita; V.S. Teodorescu; A. Luches; G. Leggieri; M. Martino; G. Majni; P. Mengucci
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 631 KB
- Volume
- 251
- Category
- Article
- ISSN
- 0040-6090
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