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Silicide formation in the Ta/Ti/Si system by reaction of codeposited Ta and Ti with Si (100) and Si (111) substrates

✍ Scribed by Pelleg, Joshua; Goldshleger, N.

Book ID
120263150
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
467 KB
Volume
85
Category
Article
ISSN
0021-8979

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