✦ LIBER ✦

Towards quantitative depth profiling with high spatial and high depth resolution

✍ Scribed by N. Vanhove; P. Lievens; W. Vandervorst

Book ID: 108060621
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 652 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.05.178

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High-depth-resolution Auger depth profil

High-depth-resolution Auger depth profiling/atomic mixing

✍ M Menyhard 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 254 KB

The ion-bombardment-induced defects and their effect on the capability of Auger depth profiling is reviewed and discussed. It is shown that by using low ion energy ( Ͻ 1 keV) and grazing angle of incidence ( Ͼ 80Њ), the quasi-quantitative detection of layers with thickness of 1 nm can be acheived. W

High resolution depth profiling of light

High resolution depth profiling of light elements

✍ G. Dollinger; T. Faestermann; P. Maier-Komor 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 581 KB

Depth profiling by ion microprobe with h

Depth profiling by ion microprobe with high mass resolution

✍ F. Degrève; R. Figaret; P. Laty 📂 Article 📅 1979 🏛 Elsevier Science ⚖ 618 KB

Hydrogen depth profiling with sub-nm res

Hydrogen depth profiling with sub-nm resolution in high-resolution ERD

✍ Kenji Kimura; Kaoru Nakajima; Hideki Imura 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 104 KB

Simultaneous high depth resolution profi

Simultaneous high depth resolution profiling of carbon and oxygen

✍ C.R. Gossett 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 335 KB

High depth resolution depth profiling of

High depth resolution depth profiling of metal films using SIMS and sample rotation

✍ D.E. Sykes; A. Chew; J. Hems; K. Stribley 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 543 KB