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Depth profiling by ion microprobe with high mass resolution

✍ Scribed by F. Degrève; R. Figaret; P. Laty


Publisher
Elsevier Science
Year
1979
Weight
618 KB
Volume
29
Category
Article
ISSN
0020-7381

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Depth profile measurement by secondary i
✍ M. Moens; M. van Craen; F.C. Adams 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 1022 KB

The possibilities of measuring depth profiles by secondary ion mass spectrometry are evaluated. The influence of different instrumental and experimental parameters on depth resolution in the profiles are studied: the effects of primary ion beam characteristics, reactive gas adsorption and mechanical