Precise nitrogen depth profiling by high-resolution RBS in combination with angle-resolved XPS

✍ Scribed by Kenji Kimura; Kaoru Nakajima; Thierry Conard; Wilfried Vandervorst; Andreas Bergmaier; Günther Dollinger

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 411 KB
• Volume: 268
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2010.02.108