Observation of the interfacial layer in HfO2(10 nm)/Si by high-resolution RBS in combination with grazing angle sputtering

✍ Scribed by W. Sakai; K. Nakajima; M. Suzuki; K. Kimura; B. Brijs

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 270 KB
• Volume: 249
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.04.006