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TiN coating and ion implantation of materials with three-dimensional topology in metal DC plasma-based ion implantation

โœ Scribed by M Sano; T Teramoto; K Yukimura; T Maruyama


Book ID
111715651
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
238 KB
Volume
136
Category
Article
ISSN
0257-8972

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