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Synthesis of amorphous carbon films by plasma-based ion implantation with simultaneous application of DC and pulse bias

โœ Scribed by Watanabe, Toshiya; Yamamoto, Kazuhiro; Tsuda, Osamu; Tanaka, Akihiro; Koga, Yoshinori; Takai, Osamu


Book ID
122933320
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
146 KB
Volume
12
Category
Article
ISSN
0925-9635

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