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Properties of thick DLC films prepared by plasma-based ion implantation and deposition using combined RF and H.V. pulses

โœ Scribed by Y. Oka; M. Tao; Y. Nishimura; K. Azuma; E. Fujiwara; M. Yatsuzuka


Book ID
114167164
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
252 KB
Volume
206
Category
Article
ISSN
0168-583X

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