✦ LIBER ✦
Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects
✍ Scribed by Kwok, Dixon T K; Li, Jianhui; Ma, Xiaobo; Chu, Paul K
- Book ID
- 120535331
- Publisher
- Institute of Physics
- Year
- 2010
- Tongue
- English
- Weight
- 469 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0022-3727
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