✦ LIBER ✦
The influence of DC biasing on the uniformity of a-C:H films for three-dimensional substrates by using a plasma-based ion implantation technique
✍ Scribed by Toshiya Watanabe; Kazuhiro Yamamoto; Osamu Tsuda; Akihiro Tanaka; Yoshinori Koga; Osamu Takai
- Book ID
- 114167203
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 507 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0168-583X
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