✦ LIBER ✦

Time-resolved optical emission spectroscopy of modulated plasmas for amorphous silicon deposition

✍ Scribed by Cicala, G; Losurdo, M; Capezzuto, P; Bruno, G

Book ID: 125832534
Publisher: Institute of Physics
Year: 1992
Tongue: English
Weight: 602 KB
Volume: 1
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/1/3/003

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Time-resolved optical emission spectrosc

Time-resolved optical emission spectroscopy of pulsed DC magnetron sputtering plasmas

✍ Lopez, J; Zhu, W; Freilich, A; Belkind, A; Becker, K 📂 Article 📅 2005 🏛 Institute of Physics 🌐 English ⚖ 254 KB

Plasma optical emission spectroscopy dia

Plasma optical emission spectroscopy diagnostic during amorphous silicon thin films deposition by Rf sputtering technique

✍ N. Benchiheb; M.S. Aida; N. Attaf 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 274 KB

Optical emission spectroscopy: Toward th

Optical emission spectroscopy: Toward the identification of species in the plasma deposition of hydrogenated amorphous silicon alloys

✍ F.J. Kampas; R.W. Griffith 📂 Article 📅 1980 🏛 Elsevier Science ⚖ 800 KB

Time resolved optical emission spectrosc

Time resolved optical emission spectroscopy of an inductively coupled plasma in argon and oxygen

✍ Tadokoro, Masahiro; Hirata, Hajime; Nakano, Nobuhiko; Petrović, Zoran Lj.; Makab 📂 Article 📅 1998 🏛 The American Physical Society 🌐 English ⚖ 143 KB

Optical emission spectroscopy as a real

Optical emission spectroscopy as a real time diagnostic tool for plasma-assisted deposition of TiN

✍ Mohamed Boumerzoug; Marcel Boudreau; Peter Mascher 📂 Article 📅 1997 🏛 Springer 🌐 English ⚖ 551 KB

Study of an argon–hydrogen RF inductive

Study of an argon–hydrogen RF inductive thermal plasma torch used for silicon deposition by optical emission spectroscopy

✍ F Bourg; S Pellerin; D Morvan; J Amouroux; J Chapelle 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 258 KB