Study of an argon–hydrogen RF inductive thermal plasma torch used for silicon deposition by optical emission spectroscopy

✍ Scribed by F Bourg; S Pellerin; D Morvan; J Amouroux; J Chapelle

• Book ID: 108472334
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 258 KB
• Volume: 72
• Category: Article
• ISSN: 0927-0248
• DOI: 10.1016/s0927-0248(01)00184-2