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Optical emission spectroscopy as a real time diagnostic tool for plasma-assisted deposition of TiN

✍ Scribed by Mohamed Boumerzoug; Marcel Boudreau; Peter Mascher

Book ID: 110676723
Publisher: Springer
Year: 1997
Tongue: English
Weight: 551 KB
Volume: 17
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf02766814

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