Plasma optical emission spectroscopy diagnostic during amorphous silicon thin films deposition by Rf sputtering technique

✍ Scribed by N. Benchiheb; M.S. Aida; N. Attaf

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 274 KB
• Volume: 172
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2010.05.018