✦ LIBER ✦
03/02046 Plasma deposition of thin film silicon: kinetics monitored by optical emission spectroscopy: Feitknecht, L. et al. Solar Energy Materials and Solar Cells, 2002, 74, (1–4), 539–545
- Publisher
- Elsevier Science
- Year
- 2003
- Weight
- 194 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0140-6701
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