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Time-dependent-dielectric-breakdown measurements of thermal oxides on n-type 6H-SiC

✍ Scribed by Mathur, M.M.; Cooper, J.A., Jr.

Book ID: 114537581
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 150 KB
Volume: 46
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.748871

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