✦ LIBER ✦
Direct Observation of Dielectric Breakdown Spot in Thermal Oxides on 4H-SiC(0001) Using Conductive Atomic Force Microscopy
✍ Scribed by Kozono, Kohei; Hosoi, Takuji; Kagei, Yusuke; Kirino, Takashi; Mitani, Shuhei; Nakano, Yuki; Nakamura, Takashi; Shimura, Takayoshi; Watanabe, Heiji
- Book ID
- 120561154
- Publisher
- Trans Tech Publications, Ltd.
- Year
- 2010
- Tongue
- English
- Weight
- 406 KB
- Volume
- 645-648
- Category
- Article
- ISSN
- 1662-9752
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