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Thin-oxide thickness measurement in ellipsometry by a wafer rotation method

✍ Scribed by Jenn-Gwo Hwu; I.-Hsiu Ho; Shou-Pin Chou

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 216 KB
Volume: 33
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(90)90037-f

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