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Thin film characterization by acoustic microscopy

✍ Scribed by Kundu, Tribmram


Book ID
115489773
Publisher
Taylor and Francis Group
Year
1997
Tongue
English
Weight
504 KB
Volume
15
Category
Article
ISSN
1058-4587

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Mechanical Characterization of Thin Film
✍ Malgorzata Kopycinska-MΓΌller; Andre Striegler; Bernd KΓΆhler; Klaus-JΓΌrgen Wolter πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 361 KB πŸ‘ 2 views

## Abstract The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50 nm can be characterized directly without t