Mechanical Characterization of Thin Film
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Malgorzata Kopycinska-MΓΌller; Andre Striegler; Bernd KΓΆhler; Klaus-JΓΌrgen Wolter
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Article
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2010
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John Wiley and Sons
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English
β 361 KB
π 2 views
## Abstract The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50βnm can be characterized directly without t