## Abstract The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50โnm can be characterized directly without t
Acoustics and atomic force microscopy for the mechanical characterization of thin films
โ Scribed by Daniele Passeri; Andrea Bettucci; Marco Rossi
- Publisher
- Springer
- Year
- 2010
- Tongue
- English
- Weight
- 487 KB
- Volume
- 396
- Category
- Article
- ISSN
- 1618-2650
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