𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Characterization of the elastic properties of amorphous silicon carbide thin films by acoustic microscopy

✍ Scribed by B Cros; E Gat; J.M Saurel

Book ID
117148072
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
408 KB
Volume
209
Category
Article
ISSN
0022-3093

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Characterization of nitrogen-doped amorp
Characterization of nitrogen-doped amorphous silicon carbide thin films
✍ J Ε afrΓ‘nkovΓ‘a; J Hurana; I HotovΓ½b; AP Kobzevc; SA Korenevc πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 202 KB

The properties of nitrogen-doped amorphous SiC films irradiated by pulse electron beams are presented with the I-V characteristics of diodes made of irradiated SiC films grown on silicon substrates. The results showed that the film conductivity increased by about two orders of magnitude as the nitro