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Elastic characterization of diamond films by acoustic microscopy

✍ Scribed by R.D. Weglein; A.K. Mal


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
685 KB
Volume
47
Category
Article
ISSN
0257-8972

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## Abstract The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50 nm can be characterized directly without t