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Imaging and characterization of film coating using scanning acoustic microscopy

✍ Scribed by Chin C. Lee; Goran Matijasevic; Xin Cheng; Chen S. Tsai

Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
781 KB
Volume
154
Category
Article
ISSN
0040-6090

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## Abstract The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50 nm can be characterized directly without t